Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Electrical Via Chain Yield for DSA Contact Hole Shrink Process

In this study, we conducted electrical via chain yield tests for the purpose of verifying the total process performance of directed self-assembly (DSA) contact hole shrink process. DSA was utilized on the via level connecting between two metal levels. From the analysis of single via resistance data, the best process condition was determined and the via chain yield was obtained. The best yield w...

Directed Self-Assembly Using Graph Grammars

In this paper we describe the graph grammar approach to modeling self-assembly. The approach is used to describe how the topology of an assembling aggregate changes as it grows. The main purpose of the paper is to demonstrate the utility of the approach by giving detailed examples. We also describe the beginnings of our approach to physically embedding graph grammar assembly rules in physical s...

Electrostatic self-assembly of polystyrene microspheres by using chemically directed contact electrification.

Herein we describe a process—based on contact electrification and electrostatic interactions—that directs the selfassembly of chemically modified polystyrene microspheres to form three-dimensional microstructures. When two solid surfaces are brought into contact and separated, charge is often transferred from one surface to the other in a process known as contact electrification. 2] We can pred...

Supporting Information for Electrostatic Self-Assembly of Polystyrene Microspheres Using Chemically-Directed Contact Electrification

Electrostatic self-assembly of macroscopic crystals using contact electrification.

Self-assembly of components larger than molecules into ordered arrays is an efficient way of preparing microstructured materials with interesting mechanical and optical properties. Although crystallization of identical particles or particles of different sizes or shapes can be readily achieved, the repertoire of methods to assemble binary lattices of particles of the same sizes but with differe...